|GAFFURI PAGANI LEONARDO||Cycle: XXXIV |
Tutor: FIORINI CARLO ETTORE
Advisor: LANGFELDER GIACOMO Major Research topic
:High-stability inertial MEMS sensors and related driving and sensing electronicsAbstract:
The research project aims at investigating how novel MEMS topologies can enable new or improved sensing capabilities; moreover exploring how different process can endow new systems that could provide a way to sense diverse physical quantities. The project will focus on developing test structures for process characterization, micro-electro mechanical structures and the associated electronics.