|Thesis abstract: |
In the last ten years the industry of MEMS devices has pushed the performances of the Inertial Measurements Units, in particular the dimensions and the power consumption. My research topic will be developed in this context: in collaboration with CEA-LETI and STMicroelectronics, two rate gyroscopes for different purposes, consumer and medical, will be designed, fabricated and tested.
The original contribution is the comparison between capacitive readout and piezoresistive readout based on a gauge at nanometric scale. The performances of the three-axis MEMS gyroscopes for consumer application, created with both the different technologies, will be studied and the guideline for the choice of the best process as a function of the target will be formulated.
In parallel, a low-power gyroscope for medical application (implantation for people with vestibular diseases) will be studied and proposed.
Through to the research period, several common fabrication and performance issues that occur in MEMS gyroscopes will be analyzed (e.g. adhesion, quadrature errors, fatigue, variability from part to part).